• University of Michigan
  • Electrical Engineering and Computer Science
  • Michigan Institute for Plasma Science and Engineering

EECS 517/NERS 578 Physical Processes in Plasmas

Fall 2012

Handouts

Handout Package-v01 (19.6 MB, Posted: 4 Sept 2012)

Naval Research Lab Plasma Formulary 2011 (451 kB, Posted: 4 Sept 2012)

Revisions to Handouts are listed here.

Updates to individual Handouts since 4 September 2012:

  1. No updates yet (... kB, Posted: ...)
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Individual Handouts (Note: The individual handouts are a subset of what appears in the master handout package.)

  1. Plasmas vs electron density-and-temperature (106 kB, Posted: 4 Sept 2012)
  2. Copper Vapor Laser (146 kB, Posted: 4 Sept 2012)
  3. Copper Vapor Laser Parameters (32 kB, Posted: 4 Sept 2012)
  4. Gaseous Electronics Reference Cell (205 kB, Posted: 4 Sept 2012)
  5. Examples of Plasma Etching Profiles (454 kB, Posted: 4 Sept 2012)
  6. Typical Etch Profiles in Si (320 kB, Posted: 4 Sept 2012)
  7. Inductively Coupled Plasma Tool Schematic (59 kB, Posted: 4 Sept 2012)
  8. Inductively Coupled Plasma Properties (103 kB, Posted: 4 Sept 2012)
  9. Commercial Plasma Tool: Tegal Plasma Etch (1.1 MB, Posted: 4 Sept 2012)
  10. Commercial Plasma Tool: Applied Materials DPS Etcher (304 kB, Posted: 4 Sept 2012)
  11. Trikon MORI Helicon Plasma Etching Tool (44 kB, Posted: 4 Sept 2012)
  12. Electric Field and Electron Temperature in a Helicon Plasma Tool (145 kB, Posted: 4 Sept 2012)
  13. ICPs in Electronegative Gases (300 kB, Posted: 4 Sept 2012)
  14. Streamers in Air (189 kB, Posted: 4 Sept 2012)
  15. Glow to Arc Transition in Air (83 kB, Posted: 4 Sept 2012)
  16. Dielectric Barrier Discharges through Glass Beads (153 kB, Posted: 4 Sept 2012)
  17. Atmospheric Pressure Microwave Discharges (99 kB, Posted: 4 Sept 2012)
  18. Atmospheric Pressure He Discharge (94 kB, Posted: 4 Sept 2012)
  19. Arc Plasma Jet (154 kB, Posted: 4 Sept 2012)
  20. Plasma Display Panels (300 kB, Posted: 4 Sept 2012)
  21. Plasma Lighting Sources (104 kB, Posted: 4 Sept 2012)
  22. Hall Thruster for Spacecraft Propulsion (152 kB, Posted: 4 Sept 2012)
  23. Large Area Plasma Source (NRL) (353 kB, Posted: 4 Sept 2012)
  24. Microdischarge Fabricated in Si Wafer (2.5 MB, Posted: 4 Sept 2012)
  25. Microdischarge Array (162 kB, Posted: 4 Sept 2012)
  26. High Power Density Laser Produced Plasma (113 kB, Posted: 4 Sept 2012)
  27. "Sloshing" of electrons about ions - Plasma Frequency (10 kB, Posted: 4 Sept 2012)
  28. Units for Debye Length and Plasma Frequency (243 kB, Posted: 4 Sept 2012)
  29. Relation Between Fluxes.... (13.9 kB, Posted: 4 Sept 2012)
  30. Electron Impact Cross Sections: SO2, CH4 (115 kB, Posted: 4 Sept 2012)
  31. Ideal Molecule (178 kB, Posted: 4 Sept 2012)
  32. Elastic Differential Cross Section for Ne (233 kB, Posted: 4 Sept 2012)
  33. Origin of the Ramsauer Minimum (51 kB, Posted: 4 Sept 2012)
  34. Elastic, Momentum Transfer and Total Cross Sections: He, Ar (116 kB, Posted: 4 Sept 2012)
  35. Electron Mobilities in He and Ar (10.9 kB, Posted: 4 Sept 2012)
  36. Drift Velocities in He and Ar (19 kB, Posted: 4 Sept 2012)
  37. Elastic Cross Sections: Ar, Xe, Kr, Cs, Hg, N2, H2, O2 (182 kB, Posted: 4 Sept 2012)
  38. He elastic cross sections and Drawin excitation cross section (256 kB, Posted: 4 Sept 2012)
  39. Drawin Electron Impact Cross Section Parameters (47 kB, Posted: 4 Sept 2012)
  40. Selection of Electron Impact Cross Sections: He, Na, N2, Vibrational Excitation Mechanism, CO, NF3 (332 kB, Posted: 4 Sept 2012)
  41. Drawin/Gryzinski ionization cross section and ionization rate coefficient (6.2 kB, Posted: 4 Sept 2012)
  42. Ionization cross sections: He, CF4, Rare Gases (74 kB, Posted: 4 Sept 2012)
  43. Electron temperature and mobility in Nitrogen (3.4 kB, Posted: 4 Sept 2012)
  44. Derivation of the Superelastic Cross Section (69 kB, Posted: 4 Sept 2012)
  45. Superelastic vs Inelastic Cross Section (12 kB, Posted: 4 Sept 2012)
  46. Analytic Expressions for Electron Impact Cross Sections (97 kB, Posted: 4 Sept 2012)
  47. Concept of Rate Equations. (352 kB, Posted: 4 Sept 2012)
  48. Electron temperature during and following a voltage pulse (12.6 kB, Posted: 4 Sept 2012)
  49. Comparison of diffusion and recombination losses (10.2 kB, Posted: 4 Sept 2012)
  50. Derivation of the Einstein relation (3.3 kB, Posted: 4 Sept 2012)
  51. Diffusion Coefficients for Electrons and Ions in Helium (36 kB, Posted: 4 Sept 2012)
  52. Ambipolar Electric field (9 kB, Posted: 4 Sept 2012)
  53. Does ambipolar diffusion violate Debye shielding? (5.5 kB, Posted: 4 Sept 2012)
  54. Transition from ambipolar-to-free diffusion (29.7 kB, Posted: 4 Sept 2012)
  55. Deriving the electron temperature when diffusion dominates (9.0 kB, Posted: 4 Sept 2012)
  56. Deriving the ambipolar diffusion coefficient and ambipolar electric field (77 kB, Posted: 4 Sept 2012)
  57. Cylindrical Glow Discharge Example (16 kb, Posted: 4 Sept 2012)
  58. Sheaths in Inductively Coupled Plasma (70 kB, Posted: 4 Sept 2012)
  59. Floating and Plasma Potentials (8 kB, Posted: 4 Sept 2012)
  60. Sheath potential and charge densities (general case) (19.1 kB, Posted: 4 Sept 2012)
  61. Sheath potential with thermal emission from surface (23 kB, Posted: 4 Sept 2012)
  62. Notation for electron velocity and energy distributions (16 kB, Posted: 4 Sept 2012)
  63. Boltzmann's equation in energy representation (31 kB, Posted: 4 Sept 2012)
  64. Sperical Harmonic Expansion of Boltzmann's Equation (26 kB, Posted: 4 Sept 2012)
  65. Druyvestine vs Maxwellian electron energy distribution (1.5 kB, Posted: 4 Sept 2012)
  66. Ideal Molecule: Electron energy distribution with electronic excitation only (46.6 kB, Posted: 4 Sept 2012)
  67. Ideal Molecule: Electron energy distribution with vibrational excitation only (39.2 kB, Posted: 4 Sept 2012)
  68. Ideal Molecule: Electron energy distribution with all processes (44.7 kB, Posted: 4 Sept 2012)
  69. Ar: Electron Impact Cross Sections and Electron Energy Distributions (58 kB, Posted: 4 Sept 2012)
  70. CF4: Electron Impact Cross Sections and Electron Energy Distributions (63 kB, Posted: 4 Sept 2012)
  71. N2: Electron Impact Cross Sections and Electron Energy Distributions (78 kB, Posted: 4 Sept 2012)
  72. Obtaining Transport Coefficients from Boltzmann's Equation (23 kB, Posted: 4 Sept 2012)
  73. Electron energy distribution in cathode fall (65 kB, Posted: 4 Sept 2012)
  74. Glow Discharge Showing Cathode Fall (106 kB, Posted: 4 Sept 2012)
  75. Glow Discharge With Striations (650 kB, Posted: 4 Sept 2012)
  76. Analytic Derivation of Properties of Normal Glow Cathode Fall (232 kB, Posted: 4 Sept 2012)
  77. Hollow Cathode Lamp (154 kB, Posted: 4 Sept 2012)
  78. W-Values for excitation rates in e-beam pumped plasmas (64 kB, Posted: 4 Sept 2012)
  79. NIKE Electron Beam Pumped KrF Laser (162 kB, Posted: 4 Sept 2012)
  80. Halogen burnup in excimer lasers (54 kB, Posted: 4 Sept 2012)
  81. Electron energy distributions in e-beam pumped plasmas (129 kB, Posted: 4 Sept 2012)
  82. Plasma etching schematic (62 kB, Posted: 4 Sept 2012)
  83. Anisotropy and feature size in plasma etching (161 kB, Posted: 4 Sept 2012)
  84. Electric fields in rf glow discharges (164 kB, Posted: 4 Sept 2012)
  85. Model of rf Glow Discharge (223 kB, Posted: 4 Sept 2012)
  86. rf Voltage-Current for Symmetric and Assymetric Systems (13 kB, Posted: 4 Sept 2012)
  87. Methods of Measuring IEDs and Examples (659 kB, Posted: 4 Sept 2012)
  88. A simple model for rf capacitively coupled discharges and Example of Scaling (296 kB, Posted: 4 Sept 2012)
  89. Schematic of an Inductively Coupled Plasma reactor (44 kB, Posted: 4 Sept 2012)
  90. ICP Electric fields and electron impact sources (70 kB, Posted: 4 Sept 2012)
  91. ICP General Properties and Introduction (1.2 MB, Posted: 4 Sept 2012)
  92. Wave Equation and Skin Depth (404 kB, Posted: 4 Sept 2012)
  93. Schematic of an Electron Cyclotron Resonance reactor: #1 (289 kB, Posted: 4 Sept 2012)
  94. Schematic of an Electron Cyclotron Resonance reactor: #2 (148 kB, Posted: 4 Sept 2012)
  95. Plasma properties in an ECR reactor (669 kB, Posted: 4 Sept 2012)
  96. Electron energy distributions in an ECR reactor (79 kB, Posted: 4 Sept 2012)
  97. Electron temperatures in an ECR reactor (52 kB, Posted: 4 Sept 2012)
  98. ECR Reactors (64 kB, Posted: 4 Sept 2012)
  99. VASMIR ICR Plasma Rocket (128 kB, Posted: 4 Sept 2012)
  100. Langmuir Probe Geometries 1 and IV Schematic (390 kB, Posted: 4 Sept 2012)
  101. Langmuir Probe Geometries 2 (142 kB, Posted: 4 Sept 2012)
  102. Electric Probe I-V Characteristic (199 kB, Posted: 4 Sept 2012)
  103. Langmuir Probe Measurements: ICP Reactor (247 kB, Posted: 4 Sept 2012)