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UNIVERSITY OF ILLINOIS

DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING

COMPUTATIONAL OPTICAL AND DISCHARGE PHYSICS GROUP

The Computational Optical and Discharge Physics Group (CODPG) develops computer simulations of low temperature plasmas and technologically important devices which use low temperature plasmas. These simulations are used as both a method of investigating the basic physical processes which occur in low temperature plasmas, and as Computer Aided Design (CAD) tools for the design of plasma equipment. Some of the applications for which the CODPG has recently developed simulations and CAD tools are:

The current emphasis of the CODPG is development of 2- and 3-dimensional computer models for plasma materials processing, and plasma remediation of toxic gases. The CODPG is well known in the microelectronics fabrication industry for its innovative simulations and visualizations of plasma processing reactors, and for its close working relationships with the industry and with national laboratories. Many of the computer models and CAD tools developed by the CODPG are available for licensing and transfer to industry. The CODPG maintains its own computing facility of high speed workstations and moderately parallel minicomputers.

A short viewgraph presentation highlighting capabilities of the CODPG is available as an ADOBE ".pdf" file. To download the file, click here. More detailed information on research capabilities can be found on our Projects page.

For more information on the availability of graduating students who are experts in computer simulation, as well as CAD tools and computer models for low temperature plasmas, contact Prof. Mark J. Kushner.


September 9, 1998
ODP Webmaster